Integrated ASIC System and CMOS-MEMS Thermally Actuated Optoelectronic Switch Array for Communication Network

The advancement of communication technology and growth of internet traffic have continuously driven the fast evolution of networks. Compared to the traditional optoelectronic switch, all-optical switch provides high throughput, rich routing functionalities, and excellent flexibility for rapid signal exchange in fiber optical network. Among various all-optical switches, thermal actuated ring switch provides the advantages of high accuracy, easy actuation, and reasonable switching speed. However, when scale up, thermal ring switch may encounter issues related to fabrication error, non-accurate wavelength response, and large terminal numbers in the control circuit. Planar-lightwave-circuit switch (PLC-SW), employing thermo-optic (TO) effect of silica glass for light switch, is a very promising technique for communication applications because of low insertion loss, high extinction ratio, long-term stability, and high reliability. There have been many matrix switches designed based on the TO effect with low-loss, polarization insensitive operation, and good fabrication repeatability. For example, 8×8 matrix switches were fabricated by using a single Mach-Zehnder (MZ) switching unit and demonstrated well performance in transmission systems, so as an 8×8 matrix switch and a 16×16 matrix switch by the similar MZ switching unit. 32×four-channel client reconfigurable optical add/drop multiplexer on planar lightwave circuit. However, when scaled up, thermal ring switch may encounter issues related to large terminal numbers in the control circuit, fabrication error and non-accurate wavelength response. For example, if conventional driving circuits are employed for a 16×28 or even larger switch array, 448 or more terminals will be required for control. Such a large number of terminals would complicate the module structure and occupy a large area. On the other hand, when a DC-current is applied for balancing wavelength offset from fabrication error, the input power will result in a temperature elevation of the neighboring switches, thus changes the related refractive indexes and therefore deviate wavelengths. To solve the aforementioned issues, this chapter proposes a ring resonator with silicon nitride as the core layer and silicon dioxide as the cladding layer was designed and fabricated on silicon substrate, a novel architecture of high selection speed three dimensional (3D) data registration for driving large-array optoelectronic packet switches. The 3D driving architecture can successfully reduce the total numbers of control pads into